By Michael Quinten
A one-stop, concise advisor on choosing and measuring skinny movie thickness via optical methods.
This sensible publication covers the legislation of electromagnetic radiation and interplay of sunshine with topic, in addition to the idea and perform of thickness size, and smooth functions. In so doing, it indicates the functions and possibilities of optical thickness selection and discusses the strengths and weaknesses of size units in addition to their overview methods.
Following an advent to the subject, bankruptcy 2 provides the fundamentals of the propagation of sunshine and different electromagnetic radiation in area and topic. the most subject of this e-book, the decision of the thickness of a layer in a layer stack by way of measuring the spectral reflectance or transmittance, is handled within the following 3 chapters. the colour of skinny layers is mentioned in bankruptcy 6. ultimately, in bankruptcy 7, the writer discusses numerous business purposes of the layer thickness dimension, together with high-reflection and anti-reflection coatings, photolithographic structuring of semiconductors, silicon on insulator, obvious conductive movies, oxides and polymers, skinny movie photovoltaics, and seriously doped silicon.
Aimed at business and educational researchers, engineers, builders and brands concerned with all components of optical layer and skinny optical movie dimension and metrology, approach keep an eye on, real-time tracking, and applications.
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Extra info for A Practical Guide to Optical Metrology for Thin Films
A Practical Guide to Optical Metrology for Thin Films by Michael Quinten